Scanning Electron Microscope

This tender concerns the acquisition of a scanning electron microscope (SEM) for a university facility that provides access to an extensive suite of nanofabrication and characterisation tools as one of its core purposes. Due to a recently identified bottleneck in the suite of high-end characterisation in the cleanroom, DTU wishes to acquire a SEM. This problem has arisen as the result of multiple breakdowns among the aging and current instruments thus exposing an unexpected vulnerability in the overall process flow of several of our commercial users. The instrument is intended to meet the characterization requirements of DTU’s key commercial customers. Accordingly, only a high-end system equipped with a field emission source, capable of delivering high emission at low energy spread, will be considered acceptable. The system must provide state-of-the-art lateral image resolution of 0.8 nm or better at an accelerating voltage of 15 kV, and 0.9 nm or better at 1 kV, both achieved without beam deceleration or sample bias and using the in-column secondary electron detector. The SEM must be compatible with samples originating directly from customer production processes and must therefore be capable of handling wafers with diameters of up to 200 mm. Typical substrate materials include silicon, fused silica, and quartz. These materials cannot be coated to reduce charging effects during SEM analysis, and the instrument must therefore be capable of imaging such non-conductive samples without the application of conductive coatings.

General information on participation in the procurement procedure: Participation in the procurement procedure may only take place electronically via the Contracting Authority’s electronic procurement system. To gain access to the procurement documents, the tenderer must be registered or register as a user. If the procurement documents contain multiple versions of the same document, the most recently uploaded version shall prevail. All communication in connection with the procurement procedure, including questions and answers, must take place via the electronic procurement system. Questions must be submitted in due time to enable the Contracting Authority to obtain the necessary information and provide responses no later than six days before the expiry of the tender deadline. Questions received later than six days before the deadline cannot be expected to be answered unless the deadline is simultaneously extended. Interested parties are encouraged to keep themselves informed via the electronic procurement system. If the applicant experiences technical issues with the system, support may be contacted via email at [email protected] or by telephone at (+45) 70 20 80 14. The tenderer must submit an ESPD as preliminary documentation for the matters referred to in the Danish Public Procurement Act. It is not necessary for the tenderer to sign the ESPD. Prior to the award decision, the tenderer that the Contracting Authority intends to award the contract to must provide documentation for the information stated in the ESPD in accordance with sections 151–152 of the Danish Public Procurement Act, cf. section 153. As an alternative to the documentation referred to in sections 153–155, 157 and 158 of the Danish Public Procurement Act, the tenderer may submit a certificate of registration on an official list of approved economic operators, cf. section 156, issued by the competent authority. The Contracting Authority may only accept such certificates from tenderers established in the country that maintains the official list. Language: All correspondence relating to the procurement must be in English. Tenders must be submitted in English. The final contract will be concluded in English. The Contracting Authority may apply the procedure set out in section 159(5) of the Danish Public Procurement Act if the tender does not comply with the formal requirements set out in the procurement documents. Please note that the procurement is covered by Article 5k of Council Regulation (EU) No 833/2014, as amended. This provision contains a prohibition against awarding contracts to Russian companies and companies under Russian control, etc. (see Article 5k(1) for the precise definition of the entities covered by the prohibition). The Contracting Authority reserves the right at any time during the procurement procedure to request documentation that the economic operators are not covered by the prohibition, for example by requiring a declaration to that effect and/or documentation regarding the place of establishment and ownership structure of the operators, as well as any subcontractors.