PROCEDURA APERTA PER AFFIDAMENTO DI FORNITURA DI SISTEMA DA LABORATORIO PER SPATIAL ATOMIC LAYER DEPOSITION
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Key information
Overview
Fornitura di un sistema di deposizione di materiali tramite Spatial Atomic Layer Deposition (Spatial ALD/sALD), integrato in glovebox e comprensivo di sorgente plasma per processi plasma-enhanced ALD.
APAP