Metrology SEM+FIB system

EF16Contract notice – general directive, standard regime3aa8ad24-0a5e-4ef3-9735-e2adad898dd3NTNederlandse Organisatie voor toegepast-natuurwetenschappelijk onderzoek TNO
19 days left
Estimated value€1,300,000
Deadline19 days left17 Aug 2026, 10:30
Competition00 participants
Lots11 lot

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Key information

Identifier
3aa8ad24-0a5e-4ef3-9735-e2adad898dd3
Contract type
—
Deadline
17 Aug 2026, 10:30
CPV codes
31712000 - Microelectronic machinery and apparatus and microsystems38900000 - Miscellaneous evaluation or testing instruments
Status
Active
Notice type
EF16Contract notice – general directive, standard regime
Source
TenderNed
Estimated value
€1,300,000
Publication date
27 Jul 2026, 12:37

Overview

The main purpose of this FIB/SEM equipment is to perform material milling (cutting), 3D characterization, and cross section analysis of epitaxially grown InP, InGaAs, InAlGaAs and InGaAsP layers on InP substrates. The structures may also contain polymer-based planarization layers, SiOx or SiNx dielectric layers and TiPtAu or NiGeAu metal layers. Levering van één SEM +FIB systeem

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Timeline

27 Jul 2026, 12:37

Publication date

Publication

17 Aug 2026, 10:30

Additional information request deadline

Deadline

07 Sept 2026, 10:00

Submission deadline

Deadline

Version history

None recorded.

Contracting authorities1

Lots1

Documentation5

5 documents

  • TN604044 - EF16 Aankondiging van een opdracht - algemene richtlijn, standaardregeling 20260727143716.pdf

    PDF document

    198.7 KB
  • Part C.zip

    Archive

    873.5 KB

  • Public Tender Metrology SEM+FIB.pdf

    PDF document

    880.8 KB
  • Part B.zip

    Archive

    192.8 KB
  • Part A.zip

    Archive

    3.6 MB

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