Lieferung einer Elektronenstrahl-Lithografieanlage (E-Beam-System)
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Key information
Overview
Lieferung einer Elektronenstrahl-Lithografieanlage (E-Beam-System)
11 May 2026, 22:00
Requested publication date
Milestone
11 May 2026, 22:00
Contract start date
Deadline
12 May 2026, 06:21
Dispatch date
Milestone
12 May 2026, 22:00
Publication date
Publication
17 Jun 2026, 18:00
Submission deadline
Deadline
20 Dec 2026, 23:00
Contract end date
Deadline
None recorded.