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Overview
An der Universität Siegen sollen, innerhalb des Reinraums (Gesamtfläche Grau/Weiß: 600m²) des Forschungsgebäudes INCYTE, Gasversorgungs- und Vakuumabgas- Installationsarbeiten zur Festinstallation von vorhandenen Großgeräten (3 x PVD, CVD, PECVD, ALD, RIE,...) erfolgen.
#Bekanntmachungs-ID: CXPNY56D25L#