FIB & SEM system (HHI-01) - PR1216644-3220-P

CN-GEN-STDContract notice – general directive, standard regimepr1216644-3220-pFBFraunhofer-Gesellschaft - Einkauf B12
Estimated value
DeadlineExpired24 Jul 2026, 07:00
Competition00 participants
Lots11 lot

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Key information

Contract type
Deadline
24 Jul 2026, 07:00
CPV codes
42900000 - Miscellaneous general and special-purpose machinery38512100 - Ion microscopes
Status
UNKN
Notice type
CN-GEN-STDContract notice – general directive, standard regime
Estimated value
Publication date
23 Jun 2026, 09:02

Overview

FIB & SEM system (HHI-01) FIB & SEM system (HHI-01)

Einsteinufer 37, Berlin, 10587, Berlin, Germany

1 Stück FIB-SEM Dualbeam System Im Rahmen der Beschaffung soll ein feldfreies (ohne Immersionsoptik) fokussiertes Ionenstrahlsystem (FIB-SEM) in Kombination mit einem hochauflösenden Rasterelektronenmikroskop (FIB-SEM) ausgewählt werden. Das System wird für die Strukturierung, Nanostrukturierung sowie Querschnitts- und Oberflächenanalyse von vorwiegend III/V-Halbleitern, LNOI, Polymeren sowie Resists und für die Halbleitertechnik typischen Prozessprodukten eingesetzt. Programmierbare und automatisierte Routinen sollten nach Möglichkeit konfigurierbar sein. Optionen - Fortgeschrittenenschulung für 15 Tage (2 Personen), Abfrage der Kontingente nach Bedarf - 1 Gasinjektionssystem mit weiteren Elementen, wird im Rahmen der Ausschreibung festgelegt - Softwaremodul zum Import von KLAF-Dateien 1 FIB-SEM dual-beam system As part of the procurement process, a field-free (without immersion optics) focused ion beam system (FIB-SEM) combined with a high-resolution scanning electron microscope (SEM) is to be selected. The system will be used for patterning, nanostructuring, and cross-sectional and surface analysis of primarily III/V semiconductors, LNOI, polymers and resists, as well as process products typical of semiconductor technology. Programmable and automated routines should be configurable where possible. Options - Advanced training course for 15 days (2 people); availability to be confirmed as required - 1 gas injection system with additional components; to be specified in the tender - Software module for importing KLAF files

Einsteinufer 37, Berlin, 10587, Berlin, Germany

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